1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

Aug 24 - Aug 26, 1988Keio Plaza Hotel, Tokyo, Japan

[C-1-5]Performance and Microstructural Analysis of 3D Circuits Fabricated in E-Beam Recrystallized SOI

Haroon AHMED, Richard A. McMAHON(1.Microelectronics Research Laboratory, Department of Physics, Cambridge University)
https://doi.org/10.7567/SSDM.1988.C-1-5
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