1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan

[A-1-2]Effect of W Film Stress on W-Gate MOS Characteristics

Hideaki MATSUHASHI, Satosi NISHIKAWA, Seigo OHNO(1.Semiconductor Technology Laboratory, OKI Electric Industry Co., Ltd.)
https://doi.org/10.7567/SSDM.1989.A-1-2
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