1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan

[A-3-2]Digital CVD of SiO2

Masayuki NAKANO, Hideaki KAWAMOTO, Akiyoshi NAGATA, Masataka HIROSE, Yasuhiro HORIIKE(1.Department of Physical Electronics, Faculty of Engineering, Hiroshima University)
https://doi.org/10.7567/SSDM.1989.A-3-2
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