1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan

[A-4-1]Dry Oxidation Study on CVD-SiO2/Thermal-SiO2/Si Structure

Shigeki KURODA, Kenji NISHI, Jun UEDA(1.Oki Electric Industry Co., Ltd.)
https://doi.org/10.7567/SSDM.1989.A-4-1
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