1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan
International Conference on Solid State Devices and Materials
1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan

[A-6-1]Effect of Trap-State on Field-Effect Mobility of MOSFET's Formed on Large Grain Poly-Si Films

Teruo KATOH, Norio HIRASHITA(1.Oki Electric Industry Co., Ltd, VLSI R&D Laboratory)
https://doi.org/10.7567/SSDM.1989.A-6-1