1989 Conference on Solid State Devices and Materials
Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan
1989 Conference on Solid State Devices and Materials
Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan
[A-8-3]Capacitance-Enhanced Stacked-Capacitor with Engraved Storage Electrode for Deep Submicron DRAMs
T. Mine, S. Iijima, J. Yugami, K. Ohga, T. Morimoto(1.Central Research Laboratory, Hitachi Ltd., 2.Hitachi VLSI Engineering Corp.)
