International Conference on Solid State Devices and Materials
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1989 Conference on Solid State Devices and Materials
Aug 28
- Aug 30, 1989
Nippon Toshi Center, Tokyo, Japan
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1989 Conference on Solid State Devices and Materials
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1989 Conference on Solid State Devices and Materials
Aug 28
- Aug 30, 1989
Nippon Toshi Center, Tokyo, Japan
[A-8-4]
A New Stacked Capacitor Cell with Thin Box Structured Storage Node
S. Inoue, A. Nitayama, K. Hieda, F. Horiguchi(1.ULSI Research Center, TOSHIBA Corporation)
https://doi.org/10.7567/SSDM.1989.A-8-4
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