1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan

[B-1-2]Microwave Plasma Etching of Silicon Dioxide for Half-Micron ULSIs

Kazuo NOJIRI, Eri IGUCHI, Koichiro KAWAMURA, Kazuya KADOTA(1.Semiconductor Design & Development Center, Hitachi Ltd., 2.Hitachi Microcomputer Engineering, Ltd.)
https://doi.org/10.7567/SSDM.1989.B-1-2
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