1989 Conference on Solid State Devices and Materials
Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan
1989 Conference on Solid State Devices and Materials
Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan
[B-2-3]A Study of Nucleation and Grain Growth in Silicon Implanted a-Silicon Films
Shigeru Kambayashi, Shinji Onga, Ichiro Mizushima, Katsuhiko Higuchi, Hiroshi Kuwano(1.ULSI Research Center, Toshiba Corporation, 2.Faculty of Science and Technology, Keio University)
