1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan

[B-2-6]Chemical State and Diffusion Behavior of As in Arsenosilicate Glass (AsSG)

Yoshitaka TSUNASHIMA, Takako OKADA, Hideichi KAWAGUCHI, Shinji ONGA, Kikuo YAMABE(1.ULSI Research Center, TOSHIBA Co.)
https://doi.org/10.7567/SSDM.1989.B-2-6
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