1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan

[B-2-7]Reduction of Threading Dislocations and Oxide Precipitates in SIMOX Material

Mamoru Tomozane, H. Ming Liaw(1.Semiconductor Research and Development Laboratory Motorola, Inc.)
https://doi.org/10.7567/SSDM.1989.B-2-7
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