1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan

[B-3-1]Micromachining and Its Application for Pressure Sensors

Susumu SUGIYAMA, Isemi IGARASHI(1.Toyota Central Res. & Develop. Labs., Inc.)
https://doi.org/10.7567/SSDM.1989.B-3-1
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