1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan
Back
International Conference on Solid State Devices and Materials
1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

Aug 28 - Aug 30, 1989Nippon Toshi Center, Tokyo, Japan

[B-3-2]Integrated Mass Flow Controller by Micromachining of Silicon

Masayosi ESASHI, Akira NAKANO, Shuichi SHOJI(1.Department of Electronic Engineering Tohoku University)
https://doi.org/10.7567/SSDM.1989.B-3-2
Download PDFDownload PDF
Back