1991 International Conference on Solid State Devices and Materials
Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
1991 International Conference on Solid State Devices and Materials
Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
[A-1-4]The Influence of Synchrotron X-Ray Damage on Hot-Carrier-Induced Degradation in Subquarter-Micron NMOSFETs
T. Tsuchiya, M. Harada, K. Deguchi, T. Matsuda(1.NTT LSI Laboratories)
