1991 International Conference on Solid State Devices and Materials
Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
1991 International Conference on Solid State Devices and Materials
Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
[A-2-5]Strain Evaluation at the Si/SiO2 Interface Using ER Method
Pornchai YONGWATTANASOONTORN, Hitoshi KUBO, Masato MORIFUJI, Kenji TANIGUCHI, Chihiro HAMAGUCHI Keitaro IMAI(1.Department of Electronic Engineering, Osaka University, 2.ULSI Research center, Toshiba Corporation)
