1991 International Conference on Solid State Devices and Materials
Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
1991 International Conference on Solid State Devices and Materials
Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
[A-3-2]Sputtering of Aluminum Film Using Microwave Plasma with High Magnetic Field
S. Takehiro, N. Yamanaka, A. Narai, H. Shindo, S. Shingubara, Y. Horiike(1.Department of Electrical Engineering, Hiroshima University)
