1991 International Conference on Solid State Devices and Materials
Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
1991 International Conference on Solid State Devices and Materials
Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
[A-3-3]Deposition of Polycrystalline Silicon by Rapid Thermal CVD and Its Application to Direct Contact to TiSi2
T. Yamaguchi, H. Itoh, T. Katayama, K. Tsukamoto, Y. Akasaka(1.LSI Laboratory, Mitsubishi Electric Corporation)
