1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan

[A-4-4]Atomic Layer Control of Germanium and Silicon on Silicon Using Flash Heating in Ultraclean Chemical Vapor Deposition

Masao SAKURABA, Junichi MUROTA, Nobuo MIKOSHIBA, Shoichi ONO(1.Research Institute of Electrical Communication, Tohoku University)
https://doi.org/10.7567/SSDM.1991.A-4-4
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