1991 International Conference on Solid State Devices and Materials
Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
1991 International Conference on Solid State Devices and Materials
Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
[B-1-2]Ion Flux Effect in Low Temperature Silicon Epitaxy by Low-Energy Ion Bombardment
Tohru YOSHIE, Masaki HIRAYAMA, Tadahiro OHMI(1.Department of Electronics, Tohoku University)
