1991 International Conference on Solid State Devices and Materials
Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
1991 International Conference on Solid State Devices and Materials
Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
[B-1-3]Amorphization Processes in Ion Implanted Si: Temperature Dependence
T. Motooka, F. Kobayashi, P. Fons, T. Tokuyama T. Suzuki, N. Natsuaki(1.University of Tsukuba, 2.Device Development Center, Hitachi, Ltd.)
