1991 International Conference on Solid State Devices and Materials
Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
1991 International Conference on Solid State Devices and Materials
Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
[B-2-2]Proximity Gettering of Micro-Defects by High Energy Ion Implantation
T. Kuroi, S. Komori, K. Fukumoto, Y. Mashiko, K. Tsukamoto, Y. Akasaka(1.LSI Laboratory, Mitsubishi Electric Corporation)
