1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan

[B-2-3]Mechanism of Intrinsic Gettering of Iron in Silicon

M. Aoki, A. Hara, A. Ohsawa(1.FUJITSU LABORATORIES LTD.)
https://doi.org/10.7567/SSDM.1991.B-2-3
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