1991 International Conference on Solid State Devices and Materials
Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
1991 International Conference on Solid State Devices and Materials
Aug 27 - Aug 29, 1991Pacifico Yokohama, Yokohama, Japan
[B-2-4]The Effects of Hot Ion-Implantation on the Electrical Properties of Amorphous-Silicon Films Produced by CVD Method
Tsutomu SATOH, Hiroshi KANOH, Osamu SUGIURA, Masakiyo MATSUMURA(1.Department of Physical Electronics, Tokyo Institute of Technology)
