1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
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International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan

[A-1-1]A New Horizon of Plasma Enhanced CVD for Future Electron Devices

M. Hirose, H. Shin, S. Miyazaki(1.Department of Electrical Engineering, Hiroshima University)
https://doi.org/10.7567/SSDM.1992.A-1-1
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