1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
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International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan

[A-1-5]Control of Interstitial Density in the Preamorphized Si by Carbon Implantation

Satoshi Nishikawa, Tetsuo Yamaji(1.Semiconductor Technology Laboratory, Oki Electric Industry Co., Ltd.)
https://doi.org/10.7567/SSDM.1992.A-1-5
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