1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
[A-2-1]Control of Si Solid-Phase Nucleation by Surface Steps for High Performance Thin Film Transistors
Tanemasa Asano, Kenji Makihira(1.Center for Microelectronic Systems, Kyushu Institute of Technology)
