1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
[A-2-5]Molecular Scale Resist Simulation and Measurement for Pattern Fluctuation Analysis
Edward W. SCHECKLER, Shoji SHUKURI, Eiji TAKEDA(1.Hitachi Central Research Laboratory, Hitachi, Ltd.)
