1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
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International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan

[A-2-6]Processing Uniformity Improvement by Magnetic Field Distribution Control in Electron Cyclotron Resonance Plasma Chamber

Hiroshi Nishimura, Mikiho Kiuchi, Seitaro Matsuo(1.NTT LSI Laboratories)
https://doi.org/10.7567/SSDM.1992.A-2-6
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