1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
[B-1-1]Low-Temperature CVD of Amorphous-Silicon and Silicon-Nitride --A New Trend of TFT Technology--
Masakiyo Matsumura, Osamu Sugiura(1.Tokyo Institute of Technology)
