1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
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International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan

[B-2-4]Ultrathin Oxide/Nitride/Oxide/Nitride Multilayer Films for Mbit DRAM Capacitors

S. Ohnishi, H. Watanabe, S. Adachi, N. Aoto, T. Kikkawa(1.Microelectronics Research Laboratories NEC Corporation)
https://doi.org/10.7567/SSDM.1992.B-2-4
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