1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
[B-2-5]Phosphorus-Implanted Polysilicon Emitters with High Emitter Efficiency
A. Pruijmboom, W. T. A. van den Einden, D. B. M. Klaassen, J. W. Slotboom, G. Streutker, A. E. M. de Veirman, P. C. Zalm(1.Philips Research Laboratories)