1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
[D-1-2]Study of a Veil Structure and a Two-Step Corrosion Suppression Process in Al-Si-Cu Etching
Kazuhito Sakuma, Shoji Yagi, Kazuo Imai(1.NTT LSI Laboratories)
