1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
[D-1-6]The Suppression of Precipitation in Boro-Phospho-Silicate-Glass Films by Surface Control by Silylation (SCS) Process
Kousaku Yano, Yuka Terai, Sin-ichi Imai, Tetsuya Ueda, Satoshi Ueda, Masayuki Endoh, Noboru Nomura(1.Semiconductor Research Center Matsushita Electric Industrial Co., Ltd.)
