1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
[PA1-2]Initial Stage of SiO2/Si Interface Formation on Si(111) Surface
Yoshinari TAMURA, Kazuaki OHISHI, Hiroshi NOHIRA, Takeo HATTORI(1.Department of Electrical and Electronic Engineering, Musashi Institute of Technology)