1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
[PA1-5]Preoxide-Controlled Oxidation for Very Thin Gate Oxide
K. Makihara, A. Teramoto, K. Nakamura M. Morita, T. Ohmi(1.Department of Electronic Engineering, Faculty of Engineering, Tohoku University)
