1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
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International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan

[PA1-6]Critical Parameters for Obtaining Low Particle Densities in an HF-Last Process

J. L. Alay, S. Verhaverbeke, W. Vandervorst, M. Heyns(1.IMECvzw, 2.LCMM, Facultat de Fisica, Universitat de Barcelona)
https://doi.org/10.7567/SSDM.1992.PA1-6
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