1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
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International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan

[PA1-7]Measurement of Physical Thickness of Native Oxide Using Accurately-Calibrated Atomic Force Microscope

Shintaro Aoyama, Yoshinori Nakagawa, Tadahiro Ohmi(1.Department of Electronics, Tohoku University)
https://doi.org/10.7567/SSDM.1992.PA1-7
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