1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
[PA1-9]Silane Thermal Decomposition Characteristics on Various Si Surface
Tsuyoshi Watanabe, Masakazu Nakamura, Atsushi Ohki, Koji Kawada Shinji Miyoshi, Shinji Takahashi, Michael S. K Chen, Tadahiro Ohmi(1.Department of Electronics, Tohoku University)
