1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
[PA1-L10]AFM/STM Investigation of pn Junctions Formed by Ion Implantation
Yasuhiro SUGAWARA, Yoshinobu FUKANO, Seizo MORITA Akihiko NAKANO, Tohru IDA(1.Department of Physics, Faculty of Science, Hiroshima University, 2.VLSI Development Laboratories, IC Group, Sharp Corporation)
