1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
1992 International Conference on Solid State Devices and Materials
Aug 26 - Aug 28, 1992Tsukuba Center Building, Tsukuba, Japan
[PA2-4]Nitrogen Dangling Bonds in Hydrogenated Amorphous Silicon Nitride Thin Films
J. Kanicki, W. L. Warren, E. H. Poindexter(1.IBM Research Division, Thomas J. Watson Research Center, 2.Sandia National Laboratories, 3.US Army ET&DL)
