1994 International Conference on Solid State Devices and Materials
Aug 23 - Aug 26, 1994Pacifico Yokohama, Yokohama, Japan
1994 International Conference on Solid State Devices and Materials
Aug 23 - Aug 26, 1994Pacifico Yokohama, Yokohama, Japan
[S-I-11-3]Formation of High Contrast Periodic Corrugations by Optimizing Optical Parameters of Photoresists in 325nm Laser Holographic Exposure
Kazuya Okamoto, Yoshiaki Nakano, Kunio Tada(1.Central Research Laboratory, Nikon Corporation, 2.Department of Electronic Engineering, University of Tokyo)
