1994 International Conference on Solid State Devices and Materials
Aug 23 - Aug 26, 1994Pacifico Yokohama, Yokohama, Japan
1994 International Conference on Solid State Devices and Materials
Aug 23 - Aug 26, 1994Pacifico Yokohama, Yokohama, Japan
[S-I-3-3]Observation of Positively Charged Trap Site in Silicon Oxide Layer with an Atomic Force Microscope
Yoshinobu FUKANO, Takahiro OKUSAKO, Takayuki UCHIHASHI, Yasuhiro SUGAWARA, Yoshiki YAMANISHI, Takahiko OASA, Seizo MORITA(1.Department of Physics, Faculty of Science, Hiroshima University, 2.Advanced Technology Research Lab., Sumitomo Metal Industries, Ltd.)
