1994 International Conference on Solid State Devices and Materials

1994 International Conference on Solid State Devices and Materials

Aug 23 - Aug 26, 1994Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1994 International Conference on Solid State Devices and Materials

1994 International Conference on Solid State Devices and Materials

Aug 23 - Aug 26, 1994Pacifico Yokohama, Yokohama, Japan

[S-I-4-2]First Application of STM Nano-Meter Size Oxidation Process to Planar-Type MIM Diode

KAZUHIKO MATSUMOTO, Shu Takahashi, Masami Ishii, Masakatsu Hoshi, Akira Kurokawa, Shingo Ichimura, Atsushi Ando(1.Electrotechnical Laboratory MITI, 2.Nissan Motor Co., LTD.)
https://doi.org/10.7567/SSDM.1994.S-I-4-2
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