1994 International Conference on Solid State Devices and Materials
Aug 23 - Aug 26, 1994Pacifico Yokohama, Yokohama, Japan
1994 International Conference on Solid State Devices and Materials
Aug 23 - Aug 26, 1994Pacifico Yokohama, Yokohama, Japan
[S-I-8-3]Direct Patterning of the Current Confinement Structure for p-Type Column-III Nitrides by Low-Energy Electron Beam Irradiation Treatment
M. Inamori, H. Sakai, T. Tanaka, H. Amano, I. Akasaki(1.Department of Electrical and Electronic Engineering, Meijo University, 2.Devices and Materials Department, Pioneer Electronic Corporation)
