1995 International Conference on Solid State Devices and Materials
Aug 21 - Aug 24, 1995International House, Osaka, Japan
1995 International Conference on Solid State Devices and Materials
Aug 21 - Aug 24, 1995International House, Osaka, Japan
[C-5-2]High-Efficiency Micromirrors and Branched Optical Waveguides on Si Chips
Tohru NAMBA, Akihito UEHARA, Takeshi DOI, Takahiko NAGATA, Yasuhide KURODA, Seiichi MIYAZAKI, Kentaro SHIBAHARA, Shin YOKOYAMA, Atsushi IWATA, Masataka HIROSE(1.Research Center for Integrated Systems, Hiroshima University, 2.Department of Electrical Engineering, Hiroshima University)
