1995 International Conference on Solid State Devices and Materials
Aug 21 - Aug 24, 1995International House, Osaka, Japan
1995 International Conference on Solid State Devices and Materials
Aug 21 - Aug 24, 1995International House, Osaka, Japan
[S-I-2-3]A New Low-Temperature Oxidation Technique by Gas Cluster Ion Beams
Makoto AKIZUKI, Jiro MATSUO, Satoru OGASAWARA, Mitsuaki HARADA, Atsumasa DOI, Isao YAMADA(1.Microelectronics Research Center, SANYO Electric Co., Ltd., 2.Ion Beam Engineering Experimental Laboratory, Kyoto University)
