1995 International Conference on Solid State Devices and Materials

1995 International Conference on Solid State Devices and Materials

Aug 21 - Aug 24, 1995International House, Osaka, Japan
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International Conference on Solid State Devices and Materials
1995 International Conference on Solid State Devices and Materials

1995 International Conference on Solid State Devices and Materials

Aug 21 - Aug 24, 1995International House, Osaka, Japan

[S-I-3-3]Oxynitride Pad LOCOS (ON-LOCOS) Isolation Technology for Gigabit DRAMs

Yasuhiro Sambonsugi, Tatsuya Yamazaki, Shoichiro Kawashima, Toshihiro Sugii(1.FUJITSU LABORATORIES LTD.)
https://doi.org/10.7567/SSDM.1995.S-I-3-3
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