1995 International Conference on Solid State Devices and Materials
Aug 21 - Aug 24, 1995International House, Osaka, Japan
1995 International Conference on Solid State Devices and Materials
Aug 21 - Aug 24, 1995International House, Osaka, Japan
[S-IV-5]Formation of Metal/Silicon Contacts for ULSI and Induced Defects by Silicidation
Yukio YASUDA, Shigeaki ZAIMA(1.Department of Crystalline Materials Science, School of Engineering, Nagoya University)
