1995 International Conference on Solid State Devices and Materials
Aug 21 - Aug 24, 1995International House, Osaka, Japan
1995 International Conference on Solid State Devices and Materials
Aug 21 - Aug 24, 1995International House, Osaka, Japan
[S-IV-9]Copper Interconnects Fabricated by Dry Etching Process
Yasushi Igarashi, Tomomi Yamanobe, Toshio Ito(1.Semiconductor Technology Laboratory, OKI Electric Industry Co., Ltd.)
