1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
1996 International Conference on Solid State Devices and Materials
Aug 26 - Aug 29, 1996Pacifico Yokohama, Yokohama, Japan
[A-3-1]Metal CVD Technology for ULSI Applications: The Aluminum Route
Andreas KNORR, Jonathan FALTERMEIER, Robert TALEVI, Heidi GUNDLACH, Kaushik Arun KUMAR, Gregory G. PETERSON, Alain E. KALOYEROS(1.New York State Center for Advanced Thin Film Technology and Department of Physics, the University at Albany-SUNY)
